A Soft Electro-Hydraulic Pneumatic Actuator with Self-Sensing Capability toward Multi-Modal Haptic Feedback

Haptic feedback is appealing for achieving the realistic perception of environmental changes human bodies in human–computer interaction fields. However, existing haptic actuators have some hurdles such as single mode, poor compatibility, or incomplete tactile information. In this study, we proposed a novel way to generate by designing soft electro-hydraulic pneumatic actuator (SEHPA) with dual drive modes. The SEHPA was structured silicone films, air chamber, flexible electrodes, and an insulating liquid dielectric good human–machine compatibility. had advantages high output force (1.5 N at 10 kPa) displacement (4.5 mm 5 kPa), well various notifications (0~400 Hz vibration). method realized smooth millinewton level (0~40 mN) micron (0~800 ?m), which further enriched details experience. addition, self-sensing capability can be dedicated monitoring ensuring precise output. SEHPAs potentially mounted on fingertips provide accurate sensation once manipulator touches object through teleoperation. More invisible information also obtained customizing notifications. excellent response behavior demonstrate candidate teleoperation